Research on Partial Null Compensator with Double-sided Switching Off-axial Reflector

Tong Yang*, Lei Yang, Jie Chen, Hongbo Xie

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Wavefront-based aspheric metrology techniques generally require a compensation lens to compensate for the primary aberrations. To expand the adaptability of the surface to be tested, this paper proposes and demonstrates a partial null compensator structure that can switch between the front and back mirror sides. The presented compensator comprises two sets of off-axis reflecting parts and a pre-compensation spheric lens in an integrated structure. An appropriate off-axis reflection combination mode can be selected for the range of the conic coefficient of the measured surface. With the simulation result, the presented compensator can adapt to a large-scale variation of the surface conic coefficient K from - 10 to +10. The average residual wavefront aberration is no more than 1λ(PV)and 1/4 λ(RMS). The results show that the proposed structure can be efficiently applied to wavefront detection or interferometer for data post-processing.

Original languageEnglish
Title of host publicationOptical Design and Testing XII
EditorsYongtian Wang, Tina E. Kidger, Rengmao Wu
PublisherSPIE
ISBN (Electronic)9781510656963
DOIs
Publication statusPublished - 2023
Externally publishedYes
EventOptical Design and Testing XII 2022 - Virtual, Online, China
Duration: 5 Dec 202211 Dec 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12315
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Design and Testing XII 2022
Country/TerritoryChina
CityVirtual, Online
Period5/12/2211/12/22

Keywords

  • off-axis mirror
  • partial compensator
  • surface measurement
  • wavefront aberration

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