Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries

Ren Jie Chen; Wei Liang; Hai Qin Zhang; Feng Wu; Li Li

doi:10.1007/s11434-012-5292-y

Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries

Ren Jie Chen, Wei Liang, Hai Qin Zhang, Feng Wu^*, Li Li

^*Corresponding author for this work

School of Material Science and Engineering

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N₂ atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.

Original language	English
Pages (from-to)	4199-4204
Number of pages	6
Journal	Chinese Science Bulletin
Volume	57
Issue number	32
DOIs	https://doi.org/10.1007/s11434-012-5292-y
Publication status	Published - Nov 2012

Keywords

LLTO thin film electrolytes
RF magnetron sputtering
ionic conductivity
lithium batteries

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10.1007/s11434-012-5292-y

Cite this

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title = "Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries",

abstract = "We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.",

keywords = "LLTO thin film electrolytes, RF magnetron sputtering, ionic conductivity, lithium batteries",

author = "Chen, {Ren Jie} and Wei Liang and Zhang, {Hai Qin} and Feng Wu and Li Li",

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T1 - Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries

AU - Chen, Ren Jie

AU - Liang, Wei

AU - Zhang, Hai Qin

AU - Wu, Feng

AU - Li, Li

PY - 2012/11

Y1 - 2012/11

N2 - We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.

AB - We prepared a series of lithium lanthanum titanate (LLTO) thin film electrolytes by radio frequency (RF) magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS), respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.

KW - LLTO thin film electrolytes

KW - RF magnetron sputtering

KW - ionic conductivity

KW - lithium batteries

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Preparation and performance of novel LLTO thin film electrolytes for thin film lithium batteries

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Keywords

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