@inproceedings{3211c11624854b8c80c9ec2f79557f1c,
title = "Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror",
abstract = "This paper reports a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. The tilting angle of the mirror is as small as 0.06°, so there is no need of complex closed-loop control. The new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure the protein content.",
keywords = "Bimorph actuator, Electrothermal actuator, Fourier transform spectrometer, Large vertical displacement, MEMS mirror, Microspectrometer, NIR spectroscopy, Soybean composition prediction",
author = "Donglin Wang and Xiaoyan Han and Hongqiong Liu and Qiao Chen and Wei Wang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",
year = "2017",
month = jul,
day = "26",
doi = "10.1109/TRANSDUCERS.2017.7994039",
language = "English",
series = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "265--268",
booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",
address = "United States",
}