TY - GEN
T1 - Phase-only pupil filtering confocal measurement system with higher lateral resolution
AU - Qiu, Lirong
AU - Feng, Zhengde
AU - Sha, Dingguo
PY - 2006
Y1 - 2006
N2 - Phase-only pupil filtering confocal microscopy (PFCM), a new approach is proposed to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, which uses a three-zone phase-only pupil filter with lateral superresolution capability obtained through optimized design to change the confocal microscopy system's (CMS) distribution of three-dimensional point spread function, so that the CMS lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFCM are better than 0.2μm and 2nm, respectively, when λ= 632.8 nm, NA=0.85 and lateral spot size with a three-zone phase-only pupil filter GT=0.65.
AB - Phase-only pupil filtering confocal microscopy (PFCM), a new approach is proposed to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, which uses a three-zone phase-only pupil filter with lateral superresolution capability obtained through optimized design to change the confocal microscopy system's (CMS) distribution of three-dimensional point spread function, so that the CMS lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFCM are better than 0.2μm and 2nm, respectively, when λ= 632.8 nm, NA=0.85 and lateral spot size with a three-zone phase-only pupil filter GT=0.65.
KW - Confocal microscopy system
KW - Pupil filter
KW - Superresolution
UR - http://www.scopus.com/inward/record.url?scp=33846566810&partnerID=8YFLogxK
U2 - 10.1117/12.717275
DO - 10.1117/12.717275
M3 - Conference contribution
AN - SCOPUS:33846566810
SN - 081946452X
SN - 9780819464521
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Sixth International Symposium on Instrumentation and Control Technology
T2 - Sitxh International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
Y2 - 13 October 2006 through 15 October 2006
ER -