Optimal design and multi-physics simulation of low power bimorph actuator for optical switch

An electrothermal bimorph actuator was designed for low-power (below 300 mW), quick-response (below 10 ms) switching application on optical micros witches. Simulations about bimorph electrothermal micro-actuator were made by a method of multiphysical coupling, which was supplied by multiphysics simulation software COMSOL Multiphysics. Optimized design for the largest displacement and multi-physical coupling simulations were determined. The conclusions show that the optimal thickness configuration can use classical theory (the simulation is made and the theory is proved) and the particular position of the heater is fixed by the multi-physical coupling simulation. Furthermore, when the bimorph actuators at different ambient temperature, the corresponding relationship between electrical power and displacement can be obtained.