Abstract
This paper reports a comprehensive analysis of the performance for gas-lubricated bearing-rotor system in silicon microengine. The generalized lubrication model and dynamics model are developed and the effects of micro fabrication defects, temperature and viscous friction force on both steady-state and dynamic characteristics of bearing system are investigated. The results can serve as a useful tool for the design of silicon microbearing- rotor systems.
| Original language | English |
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| Article number | 012089 |
| Journal | Journal of Physics: Conference Series |
| Volume | 660 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 10 Dec 2015 |
| Event | 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2015 - Boston, United States Duration: 1 Dec 2015 → 4 Dec 2015 |