@inproceedings{1802c7d8140343069e500985d9838f76,
title = "On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching",
abstract = "Microelectromechanical system (MEMS) is an interdisciplinary research and education field. The multiphysics simulation can make the abstract theory on MEMS design concrete and improve the learning efficiency. A MEMS course design is presented in this paper. The content consists of fundamental theory on MEMS design and hands-on simulation experiments. The essence of multiphysics coupling is revealed. Simulation cases are displayed. Teaching approaches are applied in the course design including hands-on simulation experiments, from an easy task to the difficult one and integration of simulation cases and theory lectures. The course design has guiding significance for other science and engineering curriculum design.",
keywords = "MEMS theory, hands-on experiment, multiphysics simulation, visualization",
author = "Jinying Zhang and Weijiang Xu and Xianmei Wu",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE International Conference on Engineering, Technology and Education, TALE 2021 ; Conference date: 05-12-2021 Through 08-12-2021",
year = "2021",
doi = "10.1109/TALE52509.2021.9678780",
language = "English",
series = "TALE 2021 - IEEE International Conference on Engineering, Technology and Education, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "769--773",
booktitle = "TALE 2021 - IEEE International Conference on Engineering, Technology and Education, Proceedings",
address = "United States",
}