On-chip micro-tribotester and its micro-fabrication

Zhanshe Guo; Chunfu Jiang; Yuxiao Zhang; Dezhi Zheng

On-chip micro-tribotester and its micro-fabrication

Zhanshe Guo^*, Chunfu Jiang, Yuxiao Zhang, Dezhi Zheng

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

An on-chip micro-tribotester was designed and fabricated to simulate the tribolgical properties for the lateral contact surfaces of MEMS devices. The loading structure, testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process. It is verified from the tested results that the static frictional coefficient between the contact pairs is 0.9 and dynamic frictional coefficient varies with normal force.

Original language	English
Pages (from-to)	2539-2542
Number of pages	4
Journal	Zhongguo Jixie Gongcheng/China Mechanical Engineering
Volume	18
Issue number	21
Publication status	Published - 10 Nov 2007
Externally published	Yes

Keywords

Bonding process
Bulk silicon technology
Dynamic frictional coefficient
On-chip micro-tribotester
Static frictional coefficient

Cite this

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abstract = "An on-chip micro-tribotester was designed and fabricated to simulate the tribolgical properties for the lateral contact surfaces of MEMS devices. The loading structure, testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process. It is verified from the tested results that the static frictional coefficient between the contact pairs is 0.9 and dynamic frictional coefficient varies with normal force.",

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AU - Jiang, Chunfu

AU - Zhang, Yuxiao

AU - Zheng, Dezhi

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AB - An on-chip micro-tribotester was designed and fabricated to simulate the tribolgical properties for the lateral contact surfaces of MEMS devices. The loading structure, testing part and force sensors were all integrated on a single chip by bulk silicon technology and bonding process. It is verified from the tested results that the static frictional coefficient between the contact pairs is 0.9 and dynamic frictional coefficient varies with normal force.

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KW - Bulk silicon technology

KW - Dynamic frictional coefficient

KW - On-chip micro-tribotester

KW - Static frictional coefficient

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ER -

On-chip micro-tribotester and its micro-fabrication

Abstract

Keywords

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