Abstract
One ultra-precision pneumatic servo motion stage combined fine and coarse control is designed in this paper. Metal bellows and the voice coil motor are used as the driving element, aerostatic stage is used to support the working stage, and the control accuracy of the motion stage is improved under conditions without friction. The hardware scheme is given in this paper, and the system mathematical model is established, and the control algorithm is analyzed too.
| Original language | English |
|---|---|
| Title of host publication | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
| Publisher | IFAC Secretariat |
| Pages | 453-456 |
| Number of pages | 4 |
| Edition | 5 |
| ISBN (Print) | 9783902823311 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 - Hangzhou, China Duration: 10 Apr 2013 → 12 Apr 2013 |
Publication series
| Name | IFAC Proceedings Volumes (IFAC-PapersOnline) |
|---|---|
| Number | 5 |
| Volume | 46 |
| ISSN (Print) | 1474-6670 |
Conference
| Conference | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
|---|---|
| Country/Territory | China |
| City | Hangzhou |
| Period | 10/04/13 → 12/04/13 |
Keywords
- Air flotation guide
- Metal bellows
- Modeling
- Pneumatic servo
- Ultra-precision
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Tian, Y., Wang, T., & Wang, M. (2013). Modeling of ultra-precision pneumatic servo control stage. In 6th IFAC Symposium on Mechatronic Systems, MECH 2013 (5 ed., pp. 453-456). (IFAC Proceedings Volumes (IFAC-PapersOnline); Vol. 46, No. 5). IFAC Secretariat. https://doi.org/10.3182/20130410-3-CN-2034.00125