TY - JOUR
T1 - Miniaturized High-Frequency Humidity Sensor Based on Quartz Crystal Microbalance
AU - Feng, Lihui
AU - Shi, Zhongyu
AU - Yang, Jueying
AU - Chen, Yu
AU - Lu, Jihua
AU - Guo, Junqiang
AU - Tang, Yi
N1 - Publisher Copyright:
© 1963-2012 IEEE.
PY - 2022
Y1 - 2022
N2 - In this article, a high-frequency quartz crystal microbalance (QCM) detection unit is fabricated by dry thinning or wet etching, whose resonant frequency is about 61 MHz and the package size is only 5.0 mm long and 3.2 mm wide. After coating a mixed solution of sodium alginate (SA) and gamma -polyglutamic acid (PGA) as the humidity sensitive film over the detection unit, we obtain the proposed QCM sensor. Then, we analyze the variations of resonance frequency and relative humidity (RH), and the response/recovery time. By practical tests, the proposed sensor exhibits a very high sensitivity of 2727.41 Hz/% RH and a decent detection limit of 0.011%RH. The proposed QCM sensor could be widely applied to measure various environmental parameters for its high performance and portability. Due to its excellent performance and small size, we further prepared a 2,, times 4 sensor array which will be more widely tested and applied in the future.
AB - In this article, a high-frequency quartz crystal microbalance (QCM) detection unit is fabricated by dry thinning or wet etching, whose resonant frequency is about 61 MHz and the package size is only 5.0 mm long and 3.2 mm wide. After coating a mixed solution of sodium alginate (SA) and gamma -polyglutamic acid (PGA) as the humidity sensitive film over the detection unit, we obtain the proposed QCM sensor. Then, we analyze the variations of resonance frequency and relative humidity (RH), and the response/recovery time. By practical tests, the proposed sensor exhibits a very high sensitivity of 2727.41 Hz/% RH and a decent detection limit of 0.011%RH. The proposed QCM sensor could be widely applied to measure various environmental parameters for its high performance and portability. Due to its excellent performance and small size, we further prepared a 2,, times 4 sensor array which will be more widely tested and applied in the future.
KW - Detection limit
KW - humidity measurement
KW - piezoelectric sensor
KW - sensitivity
KW - sensor arrays
UR - http://www.scopus.com/inward/record.url?scp=85136893327&partnerID=8YFLogxK
U2 - 10.1109/TIM.2022.3200358
DO - 10.1109/TIM.2022.3200358
M3 - Article
AN - SCOPUS:85136893327
SN - 0018-9456
VL - 71
JO - IEEE Transactions on Instrumentation and Measurement
JF - IEEE Transactions on Instrumentation and Measurement
M1 - 8005808
ER -