Abstract
A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.
Original language | English |
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Pages (from-to) | 37-42 |
Number of pages | 6 |
Journal | Binggong Xuebao/Acta Armamentarii |
Volume | 29 |
Issue number | 1 |
Publication status | Published - Jan 2008 |
Keywords
- Electron technology
- FEM
- Filter
- Micro-electro-mechanical-systems
- Shielded membrane microstrip line