MEMS millimeter-wave filter design based on 3-D finite element method

Huai Zhi Yang; Hou Jun Sun; Wei Hua Yu; Xin Lu

MEMS millimeter-wave filter design based on 3-D finite element method

Huai Zhi Yang^*, Hou Jun Sun, Wei Hua Yu, Xin Lu

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

Original language	English
Pages (from-to)	37-42
Number of pages	6
Journal	Binggong Xuebao/Acta Armamentarii
Volume	29
Issue number	1
Publication status	Published - Jan 2008

Keywords

Electron technology
FEM
Filter
Micro-electro-mechanical-systems
Shielded membrane microstrip line

Cite this

@article{744037c2fabd461ab4f0780dd602fc8b,

title = "MEMS millimeter-wave filter design based on 3-D finite element method",

abstract = "A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.",

keywords = "Electron technology, FEM, Filter, Micro-electro-mechanical-systems, Shielded membrane microstrip line",

author = "Yang, {Huai Zhi} and Sun, {Hou Jun} and Yu, {Wei Hua} and Xin Lu",

year = "2008",

month = jan,

language = "English",

volume = "29",

pages = "37--42",

journal = "Binggong Xuebao/Acta Armamentarii",

issn = "1000-1093",

publisher = "China Ordnance Society",

number = "1",

}

TY - JOUR

T1 - MEMS millimeter-wave filter design based on 3-D finite element method

AU - Yang, Huai Zhi

AU - Sun, Hou Jun

AU - Yu, Wei Hua

AU - Lu, Xin

PY - 2008/1

Y1 - 2008/1

N2 - A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

AB - A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

KW - Electron technology

KW - FEM

KW - Filter

KW - Micro-electro-mechanical-systems

KW - Shielded membrane microstrip line

UR - http://www.scopus.com/inward/record.url?scp=40949103938&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:40949103938

SN - 1000-1093

VL - 29

SP - 37

EP - 42

JO - Binggong Xuebao/Acta Armamentarii

JF - Binggong Xuebao/Acta Armamentarii

IS - 1

ER -

MEMS millimeter-wave filter design based on 3-D finite element method

Abstract

Keywords

Other files and links

Fingerprint

Cite this