MEMS millimeter-wave filter design based on 3-D finite element method

Huai Zhi Yang*, Hou Jun Sun, Wei Hua Yu, Xin Lu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

A novel design method was presented for millimeter-wave micro-electro-mechanical-systems (MEMS) filters based on FEM, which have the same results as the traditional FDTD method. Moreover, an MEMS filter's design and simple machining flow were studied, and some significantly academic analyzing and engineering application were obtained. The research of this design method is helpful and useful to the design of other millimeter-wave passive devices.

Original languageEnglish
Pages (from-to)37-42
Number of pages6
JournalBinggong Xuebao/Acta Armamentarii
Volume29
Issue number1
Publication statusPublished - Jan 2008

Keywords

  • Electron technology
  • FEM
  • Filter
  • Micro-electro-mechanical-systems
  • Shielded membrane microstrip line

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