Laser confocal radius measurement method for unpolished spheres

Xu Wang; Weiqian Zhao; Lirong Qiu; Shuai Yang; Zhongyu Wang

doi:10.1364/AO.55.004558

Laser confocal radius measurement method for unpolished spheres

Xu Wang, Weiqian Zhao^*, Lirong Qiu, Shuai Yang, Zhongyu Wang

^*Corresponding author for this work

Beihang University

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A laser confocal radius measurement method for unpolished spheres (CRMUS) is proposed for measuring the radius of an unpolished sphere during optical sphere processing. CRMUS uses the laser confocal focusing technique to accurately identify the cat's eye and confocal positions of the unpolished sphere, and then uses the distance between the cat's eye and confocal positions measured by a distance measurement interferometer to derive the radius. The partially coherent optical theoretical model of the CRMUS derived indicates that the CRMUS is able to measure the radius of the unpolished sphere with a roughness of less than 0.15 μm. Using an unpolished sphere made of Schott BK7 as the test sphere, experimental results indicate that the CRMUS has a relative expanded uncertainty of less than 20 ppm. The CRMUS could greatly increase processing efficiency.

Original language	English
Pages (from-to)	4558-4563
Number of pages	6
Journal	Applied Optics
Volume	55
Issue number	17
DOIs	https://doi.org/10.1364/AO.55.004558
Publication status	Published - 10 Jun 2016

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title = "Laser confocal radius measurement method for unpolished spheres",

abstract = "A laser confocal radius measurement method for unpolished spheres (CRMUS) is proposed for measuring the radius of an unpolished sphere during optical sphere processing. CRMUS uses the laser confocal focusing technique to accurately identify the cat's eye and confocal positions of the unpolished sphere, and then uses the distance between the cat's eye and confocal positions measured by a distance measurement interferometer to derive the radius. The partially coherent optical theoretical model of the CRMUS derived indicates that the CRMUS is able to measure the radius of the unpolished sphere with a roughness of less than 0.15 μm. Using an unpolished sphere made of Schott BK7 as the test sphere, experimental results indicate that the CRMUS has a relative expanded uncertainty of less than 20 ppm. The CRMUS could greatly increase processing efficiency.",

author = "Xu Wang and Weiqian Zhao and Lirong Qiu and Shuai Yang and Zhongyu Wang",

note = "Publisher Copyright: {\textcopyright} 2016 Optical Society of America.",

year = "2016",

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doi = "10.1364/AO.55.004558",

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TY - JOUR

T1 - Laser confocal radius measurement method for unpolished spheres

AU - Wang, Xu

AU - Zhao, Weiqian

AU - Qiu, Lirong

AU - Yang, Shuai

AU - Wang, Zhongyu

PY - 2016/6/10

Y1 - 2016/6/10

N2 - A laser confocal radius measurement method for unpolished spheres (CRMUS) is proposed for measuring the radius of an unpolished sphere during optical sphere processing. CRMUS uses the laser confocal focusing technique to accurately identify the cat's eye and confocal positions of the unpolished sphere, and then uses the distance between the cat's eye and confocal positions measured by a distance measurement interferometer to derive the radius. The partially coherent optical theoretical model of the CRMUS derived indicates that the CRMUS is able to measure the radius of the unpolished sphere with a roughness of less than 0.15 μm. Using an unpolished sphere made of Schott BK7 as the test sphere, experimental results indicate that the CRMUS has a relative expanded uncertainty of less than 20 ppm. The CRMUS could greatly increase processing efficiency.

AB - A laser confocal radius measurement method for unpolished spheres (CRMUS) is proposed for measuring the radius of an unpolished sphere during optical sphere processing. CRMUS uses the laser confocal focusing technique to accurately identify the cat's eye and confocal positions of the unpolished sphere, and then uses the distance between the cat's eye and confocal positions measured by a distance measurement interferometer to derive the radius. The partially coherent optical theoretical model of the CRMUS derived indicates that the CRMUS is able to measure the radius of the unpolished sphere with a roughness of less than 0.15 μm. Using an unpolished sphere made of Schott BK7 as the test sphere, experimental results indicate that the CRMUS has a relative expanded uncertainty of less than 20 ppm. The CRMUS could greatly increase processing efficiency.

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U2 - 10.1364/AO.55.004558

DO - 10.1364/AO.55.004558

M3 - Article

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SN - 1559-128X

VL - 55

SP - 4558

EP - 4563

JO - Applied Optics

JF - Applied Optics

IS - 17

ER -

Laser confocal radius measurement method for unpolished spheres

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