@inproceedings{8c076b928db746e6a2d3ca6b6fc9e02d,
title = "Internal structuring of silicon using THz-repetition-rate trains of ultrashort pulses",
abstract = "We generate and apply trains of infrared femtosecond pulses at the highest achievable repetition-rates. This gives unique multi-timescale control parameters used for improved energy deposition and reliable 3D laser writing deep inside silicon.",
author = "A. Wang and A. Das and D. Grojo",
note = "Publisher Copyright: CLEO 2020 {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author(s).; CLEO: Applications and Technology, CLEO_AT 2020 ; Conference date: 10-05-2020 Through 15-05-2020",
year = "2020",
doi = "10.1364/CLEO_AT.2020.ATu3K.4",
language = "English",
isbn = "9781943580767",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "CLEO",
address = "United States",
}