Abstract
We generate and apply trains of infrared femtosecond pulses at the highest achievable repetition-rates. This gives unique multi-timescale control parameters used for improved energy deposition and reliable 3D laser writing deep inside silicon.
| Original language | English |
|---|---|
| Title of host publication | CLEO |
| Subtitle of host publication | Applications and Technology, CLEO_AT 2020 |
| Publisher | Optica Publishing Group (formerly OSA) |
| ISBN (Print) | 9781943580767 |
| DOIs | |
| Publication status | Published - 2020 |
| Externally published | Yes |
| Event | CLEO: Applications and Technology, CLEO_AT 2020 - Washington, United States Duration: 10 May 2020 → 15 May 2020 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| Volume | Part F181-CLEO-AT 2020 |
| ISSN (Electronic) | 2162-2701 |
Conference
| Conference | CLEO: Applications and Technology, CLEO_AT 2020 |
|---|---|
| Country/Territory | United States |
| City | Washington |
| Period | 10/05/20 → 15/05/20 |
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Wang, A., Das, A., & Grojo, D. (2020). Internal structuring of silicon using THz-repetition-rate trains of ultrashort pulses. In CLEO: Applications and Technology, CLEO_AT 2020 Article ATu3K.4 (Optics InfoBase Conference Papers; Vol. Part F181-CLEO-AT 2020). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/CLEO_AT.2020.ATu3K.4