Influence of Ne+ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

Jing Wang; Wen Zhi Li; Heng De Li

doi:10.1023/A:1006630014602

Influence of Ne⁺ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

Jing Wang, Wen Zhi Li, Heng De Li

Tsinghua University

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp³ bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne⁺ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10^-2 mA over a 1 cm² cathode area was observed at the electric field of 5V/μm.

Original language	English
Pages (from-to)	1481-1483
Number of pages	3
Journal	Journal of Materials Science Letters
Volume	18
Issue number	18
DOIs	https://doi.org/10.1023/A:1006630014602
Publication status	Published - 1 Jan 1999
Externally published	Yes

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@article{bfc8737cefc54653a6061ca9bd66f6ef,

title = "Influence of Ne+ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition",

abstract = "Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp3 bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne+ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10-2 mA over a 1 cm2 cathode area was observed at the electric field of 5V/μm.",

author = "Jing Wang and Li, {Wen Zhi} and Li, {Heng De}",

year = "1999",

month = jan,

day = "1",

doi = "10.1023/A:1006630014602",

language = "English",

volume = "18",

pages = "1481--1483",

journal = "Journal of Materials Science Letters",

issn = "0261-8028",

publisher = "Chapman & Hall",

number = "18",

}

TY - JOUR

T1 - Influence of Ne+ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

AU - Wang, Jing

AU - Li, Wen Zhi

AU - Li, Heng De

PY - 1999/1/1

Y1 - 1999/1/1

N2 - Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp3 bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne+ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10-2 mA over a 1 cm2 cathode area was observed at the electric field of 5V/μm.

AB - Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp3 bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne+ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10-2 mA over a 1 cm2 cathode area was observed at the electric field of 5V/μm.

UR - http://www.scopus.com/inward/record.url?scp=0033188840&partnerID=8YFLogxK

U2 - 10.1023/A:1006630014602

DO - 10.1023/A:1006630014602

M3 - Article

AN - SCOPUS:0033188840

SN - 0261-8028

VL - 18

SP - 1481

EP - 1483

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 18

ER -

Influence of Ne⁺ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

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