TY - GEN
T1 - High-sensitivity capacitive silicon micro-accelerometer
AU - Ling, Wang
AU - Yongtian, Wang
AU - Hanyu, Zhao
PY - 2009
Y1 - 2009
N2 - In recent year, capacitive silicon micro-accelerometer still is the research hotspot. How to enhance the detection accuracy and further expand its application fields is the emphases and difficulty, which's key point is to reduce noise. The noise mainly includes mechanical thermal noise and detection circuit noise. The weak signal detection ways are adopted to reduce the noise, to guide the design of sensitive element and the external circuit, to improve the system linearity and resolution. And through the static and dynamic noise test, the noise power spectral density can be tested; the accelerometer sensitivity can also be detected. After testing, we can see that the sensor's linearity is 1123.2 mv/g-1, the static noise spectral density is 44.5ug/√Hz, the dynamic noise power spectral is 0.05mV/√Hz, which are superior to similar studies.
AB - In recent year, capacitive silicon micro-accelerometer still is the research hotspot. How to enhance the detection accuracy and further expand its application fields is the emphases and difficulty, which's key point is to reduce noise. The noise mainly includes mechanical thermal noise and detection circuit noise. The weak signal detection ways are adopted to reduce the noise, to guide the design of sensitive element and the external circuit, to improve the system linearity and resolution. And through the static and dynamic noise test, the noise power spectral density can be tested; the accelerometer sensitivity can also be detected. After testing, we can see that the sensor's linearity is 1123.2 mv/g-1, the static noise spectral density is 44.5ug/√Hz, the dynamic noise power spectral is 0.05mV/√Hz, which are superior to similar studies.
KW - Capacitive silicon micro-accelerometer
KW - Linearity and resolution
KW - Signal noise ratio
KW - Static and dynamic noise test
UR - http://www.scopus.com/inward/record.url?scp=71549121062&partnerID=8YFLogxK
U2 - 10.1109/ICEMI.2009.5274406
DO - 10.1109/ICEMI.2009.5274406
M3 - Conference contribution
AN - SCOPUS:71549121062
SN - 9781424438624
T3 - ICEMI 2009 - Proceedings of 9th International Conference on Electronic Measurement and Instruments
SP - 195
EP - 198
BT - ICEMI 2009 - Proceedings of 9th International Conference on Electronic Measurement and Instruments
T2 - 9th International Conference on Electronic Measurement and Instruments, ICEMI 2009
Y2 - 16 August 2009 through 19 August 2009
ER -