High-precision phase shift method for heavy-load reference mirrors based on nano-precision grating sensor monitoring

Liang Tang, Lirong Qiu, Jiahao Zhao, Shuai Yang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In large-aperture interferometry, achieving high-precision phase shifting for heavy-load reference mirrors is challenging. This study introduces a method based on nano-precision grating sensor monitoring. The technique utilizes spatial three-point synchronous driving by piezoelectric ceramics, combined with flexible hinges, to enable nanoscale phase shifting of heavy-load reference mirrors. Additionally, it integrates in-situ PID closed-loop drive monitoring at these three points, using nano-precision grating sensors and piezoelectric ceramics. To ensure nanoscale resolved spatial translation, the mirrors are supported by air-bearings that counteract gravity, coupled with a phase shift error calibration model. The final realization of high-precision and high-stability mechanical phase shifting in large-aperture interferometry circumvents the principle defects of existing large-aperture wavelength-tuned phase shifting. The experiments show that the established mechanical phase shifting system with heavy-load reference mirror has a resolution of 1.5 nm, a frequency response of 116 Hz, and a synchronization accuracy of 2° for the three phase shifting quantities, and the method provides a new method and means of phase shifting for the construction of large-aperture phase shifting interferometer.

Original languageEnglish
Article number107889
JournalOptics and Lasers in Engineering
Volume173
DOIs
Publication statusPublished - Feb 2024

Keywords

  • Large-aperture interferometry
  • Mechanical phase shifting
  • Nano-precision
  • Phase-shift monitoring
  • Surface profile

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