Fabrication and characterization of a piezoelectric energy harvester with clamped-clamped beams

Yan Cui; Menglin Yu; Shiqiao Gao; Xiangxin Kong; Wang Gu; Ran Zhang; Bowen Liu

doi:10.1063/1.5023824

Fabrication and characterization of a piezoelectric energy harvester with clamped-clamped beams

Yan Cui, Menglin Yu, Shiqiao Gao, Xiangxin Kong, Wang Gu, Ran Zhang, Bowen Liu

School of Mechatronical Engineering

Dalian University of Technology

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration a_c is 12m/s², the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.

Original language	English
Article number	055028
Journal	AIP Advances
Volume	8
Issue number	5
DOIs	https://doi.org/10.1063/1.5023824
Publication status	Published - 1 May 2018

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abstract = "This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration ac is 12m/s2, the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.",

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AU - Yu, Menglin

AU - Gao, Shiqiao

AU - Kong, Xiangxin

AU - Gu, Wang

AU - Zhang, Ran

AU - Liu, Bowen

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N2 - This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration ac is 12m/s2, the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.

AB - This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration ac is 12m/s2, the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.

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Fabrication and characterization of a piezoelectric energy harvester with clamped-clamped beams

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