EL红外缺陷测试仪关键参量校准方法研究

Ke Jia Zhang; Bi Feng Zhang; Li Min Xiong; Tao Geng Zhou; Jun Chao Zhang; Hai Feng Meng; Chuan Cai; Ying Wei He; Xiao Hui Li; Chang Shi Wang

doi:10.3969/j.issn.1000-1158.2018.02.22

EL红外缺陷测试仪关键参量校准方法研究

Translated title of the contribution: Research on Calibration Method Key Parameters of EL Infrared Defect Tester

Ke Jia Zhang, Bi Feng Zhang, Li Min Xiong, Tao Geng Zhou, Jun Chao Zhang, Hai Feng Meng, Chuan Cai, Ying Wei He, Xiao Hui Li, Chang Shi Wang

School of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

Translated title of the contribution	Research on Calibration Method Key Parameters of EL Infrared Defect Tester
Original language	Chinese (Traditional)
Pages (from-to)	246-250
Number of pages	5
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	39
Issue number	2
DOIs	https://doi.org/10.3969/j.issn.1000-1158.2018.02.22
Publication status	Published - 22 Mar 2018

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title = "EL红外缺陷测试仪关键参量校准方法研究",

abstract = "Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.",

keywords = "Calibration, EL infrared defect tester, Metrology, Resolution, SFR",

author = "Zhang, {Ke Jia} and Zhang, {Bi Feng} and Xiong, {Li Min} and Zhou, {Tao Geng} and Zhang, {Jun Chao} and Meng, {Hai Feng} and Chuan Cai and He, {Ying Wei} and Li, {Xiao Hui} and Wang, {Chang Shi}",

year = "2018",

month = mar,

day = "22",

doi = "10.3969/j.issn.1000-1158.2018.02.22",

language = "繁体中文",

volume = "39",

pages = "246--250",

journal = "Jiliang Xuebao/Acta Metrologica Sinica",

issn = "1000-1158",

publisher = "Chinese Society for Measurement",

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TY - JOUR

T1 - EL红外缺陷测试仪关键参量校准方法研究

AU - Zhang, Ke Jia

AU - Zhang, Bi Feng

AU - Xiong, Li Min

AU - Zhou, Tao Geng

AU - Zhang, Jun Chao

AU - Meng, Hai Feng

AU - Cai, Chuan

AU - He, Ying Wei

AU - Li, Xiao Hui

AU - Wang, Chang Shi

PY - 2018/3/22

Y1 - 2018/3/22

N2 - Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

AB - Based on the spatial frequency response(SFR) test method, a calibration device for the critical parameters of the EL infrared defect tester was built.The effects of focusing and position placement on the resolution calibration are analyzed.For the portable and fixed EL tester, the corresponding test methods and operational procedures are given.A test method for portable EL tester is proposed, which can realize the calibration without reference background.Based on the above calibration device, the resolution parameters of various EL testers can be calibrated and the measurement results are reproducible.

KW - Calibration

KW - EL infrared defect tester

KW - Metrology

KW - Resolution

KW - SFR

UR - http://www.scopus.com/inward/record.url?scp=85058485223&partnerID=8YFLogxK

U2 - 10.3969/j.issn.1000-1158.2018.02.22

DO - 10.3969/j.issn.1000-1158.2018.02.22

M3 - 文章

AN - SCOPUS:85058485223

SN - 1000-1158

VL - 39

SP - 246

EP - 250

JO - Jiliang Xuebao/Acta Metrologica Sinica

JF - Jiliang Xuebao/Acta Metrologica Sinica

IS - 2

ER -

EL红外缺陷测试仪关键参量校准方法研究

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