Effective multi-objective inverse lithography technology at full-field and full-chip levels with a hybrid dynamic priority algorithm

Pengzhi Wei, Yanqiu Li*, Zhaoxuan Li, Miao Yuan, Zen Li, Cheng Cheng Wang, Ang Li, Lei Qiao, He Yang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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Engineering

Chemical Engineering