Abstract
The effect of object-defocused slate on the resolution property of confocal microscopy system (CMS) was analyzed and the defocused state was considered as the main factor of influence on the lateral resolution property of CMS. In order to diminish its effect, shaping annular beam technique using binary optics based on annular pupil filter technique was proposed to improve the lateral resolution property of CMS under the defocused state. Experiments and analysis indicate that annular pupil filter technique used suppresses obviously the increasing of side lobe of Airy spot and the decreasing of CMS lateral resolution caused by the defocused state of CMS, and reaches the superresolution in the lateral direction.
| Original language | English |
|---|---|
| Pages (from-to) | 963-966 |
| Number of pages | 4 |
| Journal | Guangdianzi Jiguang/Journal of Optoelectronics Laser |
| Volume | 15 |
| Issue number | 8 |
| Publication status | Published - Aug 2004 |
| Externally published | Yes |
Keywords
- Annular pupil
- Binary optical shaping
- Confocal microscopy system (CMS)
- Defocused proper
- Surface profile