Abstract
To meet the demand for biological samples of confocal microscope with both large working distance and high-resolution, the divided-aperture technique and confocal microscopy are combined with applied to the imaging system. The optical path principle of laser divided-aperture confocal microscope (DACM), corresponding characteristics, and the block diagram of the system are described. The corresponding measurement and imaging system of DACM successfully and firstly is built. Theoretical analyses and experimental results show that: DACM has unique non-coaxial structure, the axial resolution is three times more than the single-axis system in the use of the same numerical aperture of the objective lens. Imaging a step sample of the height of 100nm, the result of the sample height is correctly and the quality of the image is favorable.
Original language | English |
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Pages (from-to) | 300-304 |
Number of pages | 5 |
Journal | Guangxue Jishu/Optical Technique |
Volume | 43 |
Issue number | 4 |
Publication status | Published - 1 Jul 2017 |
Keywords
- Divided-aperture pupil microscopy
- Imaging
- Measuring
- Microscope system
- Optical measurement
- Resolution