TY - GEN
T1 - Development of an MEMS based biomimetic whisker sensor for tactile sensing
AU - Wei, Zihou
AU - Shi, Qing
AU - Li, Chang
AU - Yan, Shurui
AU - Jia, Guanglu
AU - Zeng, Zhigang
AU - Huang, Qiang
AU - Fukuda, Toshio
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/9
Y1 - 2019/9
N2 - It has been demonstrated that biological whisker sensing system has excellent capacity to achieve the pattern recognition, and whisker sensor based robot tactile perception has caused widespread concern. However, most of current existed whisker sensors are too large in size, and are difficult to be integrated into a small robot. In this paper, we proposed a MEMS based biomimetic whisker sensor inspired by rats, which integrates four sensing units on a square silicon wafer with a side length of 6.8mm and makes it possible to be installed on a small robot with similar size to a real rat. Our sensor measure the bending moment at the root of the whisker based on the piezoresistive effect. We have explored the range of functions that whisker arrays can serve on and it is shown that our whisker sensor can determine obstacle distance, and is also capable of gathering surface information including shape and texture.
AB - It has been demonstrated that biological whisker sensing system has excellent capacity to achieve the pattern recognition, and whisker sensor based robot tactile perception has caused widespread concern. However, most of current existed whisker sensors are too large in size, and are difficult to be integrated into a small robot. In this paper, we proposed a MEMS based biomimetic whisker sensor inspired by rats, which integrates four sensing units on a square silicon wafer with a side length of 6.8mm and makes it possible to be installed on a small robot with similar size to a real rat. Our sensor measure the bending moment at the root of the whisker based on the piezoresistive effect. We have explored the range of functions that whisker arrays can serve on and it is shown that our whisker sensor can determine obstacle distance, and is also capable of gathering surface information including shape and texture.
UR - http://www.scopus.com/inward/record.url?scp=85089464685&partnerID=8YFLogxK
U2 - 10.1109/CBS46900.2019.9114501
DO - 10.1109/CBS46900.2019.9114501
M3 - Conference contribution
AN - SCOPUS:85089464685
T3 - 2019 IEEE International Conference on Cyborg and Bionic Systems, CBS 2019
SP - 222
EP - 227
BT - 2019 IEEE International Conference on Cyborg and Bionic Systems, CBS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 IEEE International Conference on Cyborg and Bionic Systems, CBS 2019
Y2 - 18 September 2019 through 20 September 2019
ER -