Designing a MEMS safety-and-arming device based on flexible materials

To solve the problem that the rigid material in the existing MEMS safety-and-arming (SA) device is prone to fracture and low reliability when facing the instantaneous impact under the detonation, we propose an electrothermal driven MEMS safety-and-arming device based on the flexible material. We combined theoretical analysis and finite element analysis to verify the feasibility of electrothermal driven MEMS safety-and-arming device based on flexible materials. And to make the structure easy to realize, we simplified the assembly process. The simulation results show that the output displacement of the electrothermal actuator increases with the increase of the span length and thickness of the V-beam. The output displacement of the micro displacement amplification mechanism is proportional to the input displacement, which meets the requirements of MEMS safety-and-arming device for the output displacement of the explosion-proof slider. Compared with the nickel slider, the material covered with flexible film can absorb and intercept the detonation energy better.