Design and fabrication of 2-DOF micromirror array based on electro-thermal actuators

Jian Liang Jiang*, Ulrich Hilleringmann

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Design and fabrication of 2-DOF micromirror array based on electro-thermal actuators'. Together they form a unique fingerprint.

Engineering