Chemical vapour deposition phase diagrams for zirconium carbide

Jinling Liu; Yongdong Xu; Laifei Cheng; Litong Zhang; Yiguang Wang

doi:10.1007/978-1-84800-241-8_22

Chemical vapour deposition phase diagrams for zirconium carbide

Jinling Liu^*, Yongdong Xu, Laifei Cheng, Litong Zhang, Yiguang Wang

^*Corresponding author for this work

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C₃H₆-ZrCl ₄-H₂ and CH₄-ZrCl₄-H₂ were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.

Original language	English
Title of host publication	Advanced Design and Manufacture to Gain a Competitive Edge
Subtitle of host publication	New Manufacturing Techniques and their Role in Improving Enterprise Performance
Publisher	CSREA Press
Pages	209-214
Number of pages	6
ISBN (Print)	9781848002401
DOIs	https://doi.org/10.1007/978-1-84800-241-8_22
Publication status	Published - 2008
Externally published	Yes
Event	Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance - Sanya, Hainan, China Duration: 14 Jan 2008 → 16 Jan 2008

Publication series

Name	Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance

Conference

Conference	Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance
Country/Territory	China
City	Sanya, Hainan
Period	14/01/08 → 16/01/08

Keywords

CVD
Deposition phase diagrams
Zirconium carbide

Access to Document

10.1007/978-1-84800-241-8_22

Cite this

Liu, J., Xu, Y., Cheng, L., Zhang, L., & Wang, Y. (2008). Chemical vapour deposition phase diagrams for zirconium carbide. In Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance (pp. 209-214). (Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance). CSREA Press. https://doi.org/10.1007/978-1-84800-241-8_22

Liu, Jinling ; Xu, Yongdong ; Cheng, Laifei et al. / Chemical vapour deposition phase diagrams for zirconium carbide. Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance. CSREA Press, 2008. pp. 209-214 (Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance).

@inproceedings{f5951513f6a0442694a7b7c540cd3992,

title = "Chemical vapour deposition phase diagrams for zirconium carbide",

abstract = "Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C3H6-ZrCl 4-H2 and CH4-ZrCl4-H2 were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.",

keywords = "CVD, Deposition phase diagrams, Zirconium carbide",

author = "Jinling Liu and Yongdong Xu and Laifei Cheng and Litong Zhang and Yiguang Wang",

year = "2008",

doi = "10.1007/978-1-84800-241-8_22",

language = "English",

isbn = "9781848002401",

series = "Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance",

publisher = "CSREA Press",

pages = "209--214",

booktitle = "Advanced Design and Manufacture to Gain a Competitive Edge",

note = "Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance ; Conference date: 14-01-2008 Through 16-01-2008",

}

Liu, J, Xu, Y, Cheng, L, Zhang, L & Wang, Y 2008, Chemical vapour deposition phase diagrams for zirconium carbide. in Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance. Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance, CSREA Press, pp. 209-214, Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance, Sanya, Hainan, China, 14/01/08. https://doi.org/10.1007/978-1-84800-241-8_22

Chemical vapour deposition phase diagrams for zirconium carbide. / Liu, Jinling; Xu, Yongdong; Cheng, Laifei et al.
Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance. CSREA Press, 2008. p. 209-214 (Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Chemical vapour deposition phase diagrams for zirconium carbide

AU - Liu, Jinling

AU - Xu, Yongdong

AU - Cheng, Laifei

AU - Zhang, Litong

AU - Wang, Yiguang

PY - 2008

Y1 - 2008

N2 - Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C3H6-ZrCl 4-H2 and CH4-ZrCl4-H2 were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.

AB - Thermodynamic equilibrium condensed phases for chemical vapor deposition (CVD) of zirconium carbide (ZrC) from C3H6-ZrCl 4-H2 and CH4-ZrCl4-H2 were calculated by a method based on the minimization of the free energy of the reaction system. The deposition phase diagrams, which indicated the condensed phases, were then constructed from the calculation results. These diagrams demonstrated the effect of partial pressure of reactants, deposition temperatures, and the different carbon sources on the final condensed phases. Useful information can be provided from these diagrams to determine the process parameters for the deposition of ZrC coatings.

KW - CVD

KW - Deposition phase diagrams

KW - Zirconium carbide

UR - http://www.scopus.com/inward/record.url?scp=77957359713&partnerID=8YFLogxK

U2 - 10.1007/978-1-84800-241-8_22

DO - 10.1007/978-1-84800-241-8_22

M3 - Conference contribution

AN - SCOPUS:77957359713

SN - 9781848002401

T3 - Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance

SP - 209

EP - 214

BT - Advanced Design and Manufacture to Gain a Competitive Edge

PB - CSREA Press

T2 - Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance

Y2 - 14 January 2008 through 16 January 2008

ER -

Liu J, Xu Y, Cheng L, Zhang L, Wang Y. Chemical vapour deposition phase diagrams for zirconium carbide. In Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance. CSREA Press. 2008. p. 209-214. (Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance). doi: 10.1007/978-1-84800-241-8_22

Chemical vapour deposition phase diagrams for zirconium carbide

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