Abstract
Elliptic ultrasonic vibration-assisted grinding has been proven to be a high-efficiency machining technique for some brittle materials. This paper aims to investigate the chip generating characteristics in grinding of brittle materials with vertical elliptic vibration assistance. Vertical elliptic ultrasonic vibration-assisted grinding for precision machining brittle polysilicon is suggested and tested. The mechanism of chip generation and characteristics of surfaces in ductile mode, machined by ultrasonic vibration-assisted grinding, are investigated. As a result, when microgrinding by ultrasonic vibration, it was confirmed that the continuous chips generated by ductile mode can be more easily be fully developed.
| Original language | English |
|---|---|
| Pages (from-to) | 563-568 |
| Number of pages | 6 |
| Journal | International Journal of Advanced Manufacturing Technology |
| Volume | 62 |
| Issue number | 5-8 |
| DOIs | |
| Publication status | Published - Sept 2012 |
Keywords
- Chip
- Ductile
- Elliptic vibration-assisted grinding
- Surface roughness