CCD probe: Application of linear array CCD in large dimension measurement

Hao Qun; Cao Mang; Zhao Yang; Li Dacheng

doi:10.1117/12.279797

CCD probe: Application of linear array CCD in large dimension measurement

Hao Qun^*, Cao Mang, Zhao Yang, Li Dacheng

^*Corresponding author for this work

Tsinghua University

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a one-dimension asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.

Original language	English
Pages (from-to)	330-334
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3174
DOIs	https://doi.org/10.1117/12.279797
Publication status	Published - 1997
Externally published	Yes
Event	Videometrics V - San Diego, CA, United States Duration: 30 Jul 1997 → 30 Jul 1997

Keywords

CCD probe
Diffraction pattern
Form and position errors
Laser beam

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10.1117/12.279797

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title = "CCD probe: Application of linear array CCD in large dimension measurement",

abstract = "A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a one-dimension asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.",

keywords = "CCD probe, Diffraction pattern, Form and position errors, Laser beam",

author = "Hao Qun and Cao Mang and Zhao Yang and Li Dacheng",

year = "1997",

doi = "10.1117/12.279797",

language = "English",

volume = "3174",

pages = "330--334",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Videometrics V ; Conference date: 30-07-1997 Through 30-07-1997",

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TY - JOUR

T1 - CCD probe

T2 - Videometrics V

AU - Qun, Hao

AU - Mang, Cao

AU - Yang, Zhao

AU - Dacheng, Li

PY - 1997

Y1 - 1997

N2 - A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a one-dimension asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.

AB - A research on using linear array CCD detecting technique in measuring form and position errors of large scale dimension is described in this paper. The basic idea of this kind of measurement is that using a stable aligned laser beam incident on a one-dimension asymmetrical phase plate to form a black line as the reference of the beam, form and position datum lines and planes can be established through a scanner. A linear array CCD is used to measure deviation between the datum and the quantity be measured directly and absolutely. In the paper, we also discuss the reading error of the CCD probe caused by various factors in detail and introduce the CCD probe and its signal processing circuit. Some of experiment results and its application are shown.

KW - CCD probe

KW - Diffraction pattern

KW - Form and position errors

KW - Laser beam

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U2 - 10.1117/12.279797

DO - 10.1117/12.279797

M3 - Conference article

AN - SCOPUS:57549094796

SN - 0277-786X

VL - 3174

SP - 330

EP - 334

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

Y2 - 30 July 1997 through 30 July 1997

ER -

CCD probe: Application of linear array CCD in large dimension measurement

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Keywords

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