Calibrating the ZYGO Interferometer Through the Internet

Lingfeng Chen*, Feng Yue, Huilan Liu, Dingguo Sha

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Calibrating instrument through the Internet is a new trend in measurement field. The significances of this technology are it's efficiency and the potential to shorten the traceability chain to a single link with national measurement standards. In this paper, we will summarize the research and developments by some developed countries In recent years, and analyze the basic implementing model. As an example, this paper also presents detailedly our Internet Calibrating practice aim at ZYGO interferorneter(model: GPI-XP-IV). Our research includes three main parts: the design of transmission standard calibrating and testing ZYGO interferometer through network the network database system. Lastly, we analyze concisely the relevant technology in implementation such as network time synchronization network security.

Original languageEnglish
Title of host publicationProceedings of the International Symposium on Test and Measurement
Pages4769-4772
Number of pages4
Publication statusPublished - 2003

Publication series

NameProceedings of the International Symposium on Test and Measurement
Volume6

Keywords

  • Internet Calibration
  • Standard
  • Traceability
  • ZYCO interferometer

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