TY - GEN
T1 - Automated pick-up of carbon nanotubes inside a scanning electron microscope
AU - Guo, Yana
AU - Shi, Qing
AU - Yang, Zhan
AU - Wang, Huaping
AU - Yu, Ning
AU - Sun, Lining
AU - Huang, Qiang
AU - Fukuda, Toshio
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - It is of great importance to pick up a single carbon nanotube (CNT) from a bulk of CNTs for nanodevice fabrication. In this study, we have proposed a nanorobotic manipulation system allowing automated pick-up of CNTs based on visual feedback. We utilize histogram normalization for automatic binarization, and it achieves to clearly distinguish CNTs from substrate and other impurities under different image brightness. Furthermore, we develop the gradient orientation inversion (GOI) algorithm to recognize CNT tip and atomic force microscopy (AFM) cantilever. Taking full advantages of the geometrical characteristics of CNT and AFM cantilever, GOI is proved to be quite robust. We have designed segment detection method (SDM) to successfully separate the AFM cantilever and CNT, whereas the contact detection between them is achieved by analyzing the straightness variation. Preliminary experimental results imply that our method shows high promise in realistic fabrication of nanodevices.
AB - It is of great importance to pick up a single carbon nanotube (CNT) from a bulk of CNTs for nanodevice fabrication. In this study, we have proposed a nanorobotic manipulation system allowing automated pick-up of CNTs based on visual feedback. We utilize histogram normalization for automatic binarization, and it achieves to clearly distinguish CNTs from substrate and other impurities under different image brightness. Furthermore, we develop the gradient orientation inversion (GOI) algorithm to recognize CNT tip and atomic force microscopy (AFM) cantilever. Taking full advantages of the geometrical characteristics of CNT and AFM cantilever, GOI is proved to be quite robust. We have designed segment detection method (SDM) to successfully separate the AFM cantilever and CNT, whereas the contact detection between them is achieved by analyzing the straightness variation. Preliminary experimental results imply that our method shows high promise in realistic fabrication of nanodevices.
UR - http://www.scopus.com/inward/record.url?scp=85006482393&partnerID=8YFLogxK
U2 - 10.1109/IROS.2016.7759782
DO - 10.1109/IROS.2016.7759782
M3 - Conference contribution
AN - SCOPUS:85006482393
T3 - IEEE International Conference on Intelligent Robots and Systems
SP - 5318
EP - 5323
BT - IROS 2016 - 2016 IEEE/RSJ International Conference on Intelligent Robots and Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2016 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2016
Y2 - 9 October 2016 through 14 October 2016
ER -