@inproceedings{048319951bd24b63b2f573aef4fd52a1,
title = "An improved tungsten titanium film photolithography process with single photoresist shaping mask",
abstract = "Tungsten titanium thin film with unique advantages has been widely applied in MEMS and CMOS fabrication. Micromechanical tungsten titanium structure layer demands an improved patterning process with high yield and precision to eliminate error and failure risk introduced by a commonly used additional upper aluminium mask. A tungsten titanium film photolithography process with single photoresist shaping mask and etching temperature control is presented. An experiment was made with photoresist coated samples to investigate the etching effect on photoresist and tungsten titanium relating to film thickness and temperature. Based on experiment analyses, the lithography parameters including photoresist processing and etching temperature were optimized to enhance the shielding ability of photoresist shaping mask during the entire tungsten titanium etching process. By following the improved lithography process, tungsten titanium test structures were fabricated to evaluate pattering quality. The fabricated structures demonstrated simplified fabrication flow and pattering precision, which obtained solutions of 2 μm in positive structures and 1 μm in negative structures.",
author = "Gang Wang and Xu, {Li Xin} and Lu, {Chong Ying} and Qin Han and Lin Cong",
note = "Publisher Copyright: {\textcopyright} 2015 Taylor & Francis Group, London.; International Conference on Energy Equipment Science and Engineering, ICEESE 2015 ; Conference date: 30-05-2015 Through 31-05-2015",
year = "2015",
language = "English",
isbn = "9781138029330",
series = "Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015",
publisher = "CRC Press/Balkema",
pages = "2503--2508",
editor = "Aragona Patty and Shiquan Zhou and Shiming Chen",
booktitle = "Advances in Energy Science and Equipment Engineering - Proceedings of International Conference on Energy Equipment Science and Engineering, ICEESE 2015",
}