An electrothermal micromirror with high linear scanning efficiency

Sagnik Pal; Kemiao Jia; Huikai Xie

doi:10.1109/LEOS.2007.4382707

An electrothermal micromirror with high linear scanning efficiency

Sagnik Pal^*, Kemiao Jia, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

Abstract

An electrothermal micromirror with an aperture size of 1 mm × 1.2 mm has been developed. The mirror can tilt as much as 21° with a 15V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.

Original language	English
Title of host publication	LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
Pages	914-915
Number of pages	2
DOIs	https://doi.org/10.1109/LEOS.2007.4382707
Publication status	Published - 2007
Externally published	Yes
Event	20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS - Lake Buena Vista, FL, United States Duration: 21 Oct 2007 → 25 Oct 2007

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN (Print)	1092-8081

Conference

Conference	20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
Country/Territory	United States
City	Lake Buena Vista, FL
Period	21/10/07 → 25/10/07

Keywords

Electrothermal actuation
Linear scanning
MEMS
Micromirrors
Optical imaging

Access to Document

10.1109/LEOS.2007.4382707

Cite this

Pal, S., Jia, K., & Xie, H. (2007). An electrothermal micromirror with high linear scanning efficiency. In LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings (pp. 914-915). Article 4382707 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). https://doi.org/10.1109/LEOS.2007.4382707

@inproceedings{51f78cf60df44eda88404130ef42b42c,

title = "An electrothermal micromirror with high linear scanning efficiency",

abstract = "An electrothermal micromirror with an aperture size of 1 mm × 1.2 mm has been developed. The mirror can tilt as much as 21° with a 15V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.",

keywords = "Electrothermal actuation, Linear scanning, MEMS, Micromirrors, Optical imaging",

author = "Sagnik Pal and Kemiao Jia and Huikai Xie",

year = "2007",

doi = "10.1109/LEOS.2007.4382707",

language = "English",

isbn = "142440925X",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

pages = "914--915",

booktitle = "LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings",

note = "20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS ; Conference date: 21-10-2007 Through 25-10-2007",

}

Pal, S, Jia, K & Xie, H 2007, An electrothermal micromirror with high linear scanning efficiency. in LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings., 4382707, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, pp. 914-915, 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS, Lake Buena Vista, FL, United States, 21/10/07. https://doi.org/10.1109/LEOS.2007.4382707

An electrothermal micromirror with high linear scanning efficiency. / Pal, Sagnik; Jia, Kemiao; Xie, Huikai.
LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings. 2007. p. 914-915 4382707 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An electrothermal micromirror with high linear scanning efficiency

AU - Pal, Sagnik

AU - Jia, Kemiao

AU - Xie, Huikai

PY - 2007

Y1 - 2007

N2 - An electrothermal micromirror with an aperture size of 1 mm × 1.2 mm has been developed. The mirror can tilt as much as 21° with a 15V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.

AB - An electrothermal micromirror with an aperture size of 1 mm × 1.2 mm has been developed. The mirror can tilt as much as 21° with a 15V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.

KW - Electrothermal actuation

KW - Linear scanning

KW - MEMS

KW - Micromirrors

KW - Optical imaging

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U2 - 10.1109/LEOS.2007.4382707

DO - 10.1109/LEOS.2007.4382707

M3 - Conference contribution

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SN - 142440925X

SN - 9781424409259

T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

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EP - 915

BT - LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings

T2 - 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS

Y2 - 21 October 2007 through 25 October 2007

ER -

An electrothermal micromirror with high linear scanning efficiency

Abstract

Publication series

Conference

Keywords

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