@inproceedings{51f78cf60df44eda88404130ef42b42c,
title = "An electrothermal micromirror with high linear scanning efficiency",
abstract = "An electrothermal micromirror with an aperture size of 1 mm × 1.2 mm has been developed. The mirror can tilt as much as 21° with a 15V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.",
keywords = "Electrothermal actuation, Linear scanning, MEMS, Micromirrors, Optical imaging",
author = "Sagnik Pal and Kemiao Jia and Huikai Xie",
year = "2007",
doi = "10.1109/LEOS.2007.4382707",
language = "English",
isbn = "142440925X",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",
pages = "914--915",
booktitle = "LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings",
note = "20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS ; Conference date: 21-10-2007 Through 25-10-2007",
}