A wide-angle immersed MEMS mirror and its application in optical coherence tomography

Xiaoyang Zhang; Liang Zhou; Can Duan; Dong Zheng; Sanjeev Koppal; Quentin Tanguy; Huikai Xie

doi:10.1109/OMN.2016.7565908

A wide-angle immersed MEMS mirror and its application in optical coherence tomography

Xiaoyang Zhang, Liang Zhou, Can Duan, Dong Zheng, Sanjeev Koppal, Quentin Tanguy, Huikai Xie

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565908
Publication status	Published - 13 Sept 2016
Externally published	Yes
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 31 Jul 2016 → 4 Aug 2016

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	2016-September
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	31/07/16 → 4/08/16

Keywords

MEMS in liquid
MEMS mirror
OCT
electrothermal bimorph
wide angle

Access to Document

10.1109/OMN.2016.7565908

Cite this

Zhang, X., Zhou, L., Duan, C., Zheng, D., Koppal, S., Tanguy, Q., & Xie, H. (2016). A wide-angle immersed MEMS mirror and its application in optical coherence tomography. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings Article 7565908 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September). IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565908

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title = "A wide-angle immersed MEMS mirror and its application in optical coherence tomography",

abstract = "In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.",

keywords = "MEMS in liquid, MEMS mirror, OCT, electrothermal bimorph, wide angle",

author = "Xiaoyang Zhang and Liang Zhou and Can Duan and Dong Zheng and Sanjeev Koppal and Quentin Tanguy and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565908",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

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Zhang, X, Zhou, L, Duan, C, Zheng, D, Koppal, S, Tanguy, Q & Xie, H 2016, A wide-angle immersed MEMS mirror and its application in optical coherence tomography. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings., 7565908, International Conference on Optical MEMS and Nanophotonics, vol. 2016-September, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 31/07/16. https://doi.org/10.1109/OMN.2016.7565908

A wide-angle immersed MEMS mirror and its application in optical coherence tomography. / Zhang, Xiaoyang; Zhou, Liang; Duan, Can et al.
2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. IEEE Computer Society, 2016. 7565908 (International Conference on Optical MEMS and Nanophotonics; Vol. 2016-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A wide-angle immersed MEMS mirror and its application in optical coherence tomography

AU - Zhang, Xiaoyang

AU - Zhou, Liang

AU - Duan, Can

AU - Zheng, Dong

AU - Koppal, Sanjeev

AU - Tanguy, Quentin

AU - Xie, Huikai

PY - 2016/9/13

Y1 - 2016/9/13

N2 - In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.

AB - In this paper we report a wide-angle two-axis electrothermal MEMS scanning mirror and its application in optical coherence tomography (OCT). The wide-angle scanning was achieved by combining the large scan range of the MEMS mirror and the 'Snell's Window' effect. By immersing the electrothermal MEMS mirror into a mineral oil, the original 32° field of view (FOV) can be increased up to about 75°. The wide-angle immersed mirror was employed in an OCT system and 3D OCT images were successfully obtained.

KW - MEMS in liquid

KW - MEMS mirror

KW - OCT

KW - electrothermal bimorph

KW - wide angle

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U2 - 10.1109/OMN.2016.7565908

DO - 10.1109/OMN.2016.7565908

M3 - Conference contribution

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T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

A wide-angle immersed MEMS mirror and its application in optical coherence tomography

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