A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Ankur Jain; Anthony Kopa; Yingtian Pan; Gary K. Feeder; Huikai Xie

doi:10.1109/JSTQE.2004.829194

A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Ankur Jain^*, Anthony Kopa, Yingtian Pan, Gary K. Feeder, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

136 Citations (Scopus)

Abstract

This paper reports a 1-mm², two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

Original language	English
Pages (from-to)	636-642
Number of pages	7
Journal	IEEE Journal of Selected Topics in Quantum Electronics
Volume	10
Issue number	3
DOIs	https://doi.org/10.1109/JSTQE.2004.829194
Publication status	Published - May 2004
Externally published	Yes

Keywords

Electrothermal actuation
Microactuators
Optical coherence tomography
Optical scanners
Two-dimensional (2-D) mirrors

Access to Document

10.1109/JSTQE.2004.829194

Cite this

@article{956db28f0fb54e91b9d744bdf9008fbf,

title = "A two-axis electrothermal micromirror for endoscopic optical coherence tomography",

abstract = "This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.",

keywords = "Electrothermal actuation, Microactuators, Optical coherence tomography, Optical scanners, Two-dimensional (2-D) mirrors",

author = "Ankur Jain and Anthony Kopa and Yingtian Pan and Feeder, {Gary K.} and Huikai Xie",

year = "2004",

month = may,

doi = "10.1109/JSTQE.2004.829194",

language = "English",

volume = "10",

pages = "636--642",

journal = "IEEE Journal of Selected Topics in Quantum Electronics",

issn = "1077-260X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

}

TY - JOUR

T1 - A two-axis electrothermal micromirror for endoscopic optical coherence tomography

AU - Jain, Ankur

AU - Kopa, Anthony

AU - Pan, Yingtian

AU - Feeder, Gary K.

AU - Xie, Huikai

PY - 2004/5

Y1 - 2004/5

N2 - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

AB - This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

KW - Electrothermal actuation

KW - Microactuators

KW - Optical coherence tomography

KW - Optical scanners

KW - Two-dimensional (2-D) mirrors

UR - http://www.scopus.com/inward/record.url?scp=4344565790&partnerID=8YFLogxK

U2 - 10.1109/JSTQE.2004.829194

DO - 10.1109/JSTQE.2004.829194

M3 - Article

AN - SCOPUS:4344565790

SN - 1077-260X

VL - 10

SP - 636

EP - 642

JO - IEEE Journal of Selected Topics in Quantum Electronics

JF - IEEE Journal of Selected Topics in Quantum Electronics

IS - 3

ER -

A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this