A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Ankur Jain*, Anthony Kopa, Yingtian Pan, Gary K. Feeder, Huikai Xie

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

137 Citations (Scopus)

Abstract

This paper reports a 1-mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated scanning micromirror with large rotation angle (up to 40°), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 × 4 pixel display using this two-dimensional micromirror device has been demonstrated.

Original languageEnglish
Pages (from-to)636-642
Number of pages7
JournalIEEE Journal of Selected Topics in Quantum Electronics
Volume10
Issue number3
DOIs
Publication statusPublished - May 2004
Externally publishedYes

Keywords

  • Electrothermal actuation
  • Microactuators
  • Optical coherence tomography
  • Optical scanners
  • Two-dimensional (2-D) mirrors

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