TY - GEN
T1 - A Nonlinear One-Dimensional Model of Thermoresistive Micro Calorimetric Flow Sensor for Response Time Improving
AU - Ke, Zongqin
AU - Wang, Xiaoyi
AU - Xu, Xuankai
AU - Cao, Xuanhao
AU - Izhar,
AU - Xu, Wei
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/27
Y1 - 2020/9/27
N2 - We developed a nonlinear one-dimensional (1-D) model to optimize the response time of the Thermoresistive Micro Calorimetric Flow (TMCF) sensor. The proposed sensor model was verified by the reported experimental data and it was further used for the efficient optimization of the TMCF sensor design with different key parameters: (1) the response time τc prediction, (2) the optimum distance D from microheater to thermal sensing element, (3) membrane thickness t, (4) the depth of bottom cavity h. After that, we designed and fabricated a TMCF sensor with CMOS compatible materials using MEMS technology. The measured response time of the TMCF sensors with the nitrogen flow from 0 m/s to 8 m/s was in reasonable agreement with the theoretical prediction. Therefore, this nonlinear model can be quite useful for the design and optimization of a new TMCF sensor. Moreover, the measured response time of the fabricated flow sensor (pair 1) is as good as less than 6 ms, which reveals that our developed TMCF sensor can be used for the monitoring of human respiration in the future.
AB - We developed a nonlinear one-dimensional (1-D) model to optimize the response time of the Thermoresistive Micro Calorimetric Flow (TMCF) sensor. The proposed sensor model was verified by the reported experimental data and it was further used for the efficient optimization of the TMCF sensor design with different key parameters: (1) the response time τc prediction, (2) the optimum distance D from microheater to thermal sensing element, (3) membrane thickness t, (4) the depth of bottom cavity h. After that, we designed and fabricated a TMCF sensor with CMOS compatible materials using MEMS technology. The measured response time of the TMCF sensors with the nitrogen flow from 0 m/s to 8 m/s was in reasonable agreement with the theoretical prediction. Therefore, this nonlinear model can be quite useful for the design and optimization of a new TMCF sensor. Moreover, the measured response time of the fabricated flow sensor (pair 1) is as good as less than 6 ms, which reveals that our developed TMCF sensor can be used for the monitoring of human respiration in the future.
UR - http://www.scopus.com/inward/record.url?scp=85098487635&partnerID=8YFLogxK
U2 - 10.1109/NEMS50311.2020.9265550
DO - 10.1109/NEMS50311.2020.9265550
M3 - Conference contribution
AN - SCOPUS:85098487635
T3 - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
SP - 67
EP - 71
BT - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020
Y2 - 27 September 2020 through 30 September 2020
ER -