A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

L. Wu; A. Pais; S. R. Samuelson; S. Guo; H. Xie

doi:10.1109/SENSOR.2009.5285647

A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

L. Wu^*, A. Pais, S. R. Samuelson, S. Guo, H. Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

20 Citations (Scopus)

Abstract

We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7° for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm^-1.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2090-2093
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285647
Publication status	Published - 2009
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 21 Jun 2009 → 25 Jun 2009

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	21/06/09 → 25/06/09

Keywords

Bimorph
Electrothermal actuation
Fourier transform spectrometer
Large-vertical-displacement
MEMS mirror
Mirror-tilt-insensitive

Access to Document

10.1109/SENSOR.2009.5285647

Cite this

Wu, L., Pais, A., Samuelson, S. R., Guo, S., & Xie, H. (2009). A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2090-2093). Article 5285647 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285647

Wu, L. ; Pais, A. ; Samuelson, S. R. et al. / A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. pp. 2090-2093 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

@inproceedings{a0a7d36a6250498c904e23383dade2ce,

title = "A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface",

abstract = "We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7° for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm-1.",

keywords = "Bimorph, Electrothermal actuation, Fourier transform spectrometer, Large-vertical-displacement, MEMS mirror, Mirror-tilt-insensitive",

author = "L. Wu and A. Pais and Samuelson, \{S. R.\} and S. Guo and H. Xie",

year = "2009",

doi = "10.1109/SENSOR.2009.5285647",

language = "English",

isbn = "9781424441938",

series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "2090--2093",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

Wu, L, Pais, A, Samuelson, SR, Guo, S & Xie, H 2009, A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285647, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 2090-2093, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 21/06/09. https://doi.org/10.1109/SENSOR.2009.5285647

A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface. / Wu, L.; Pais, A.; Samuelson, S. R. et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2090-2093 5285647 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

AU - Wu, L.

AU - Pais, A.

AU - Samuelson, S. R.

AU - Guo, S.

AU - Xie, H.

PY - 2009

Y1 - 2009

N2 - We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7° for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm-1.

AB - We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7° for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm-1.

KW - Bimorph

KW - Electrothermal actuation

KW - Fourier transform spectrometer

KW - Large-vertical-displacement

KW - MEMS mirror

KW - Mirror-tilt-insensitive

UR - http://www.scopus.com/inward/record.url?scp=71449095606&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285647

DO - 10.1109/SENSOR.2009.5285647

M3 - Conference contribution

AN - SCOPUS:71449095606

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 2090

EP - 2093

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Wu L, Pais A, Samuelson SR, Guo S, Xie H. A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2090-2093. 5285647. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285647

A mirror-tilt-insensitive fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

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