A laser reflection confocal large-radius measurement

Xin Zhang, Lirong Qiu, Zhigang Li, Weiqian Zhao

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Abstract

We propose a new laser reflection confocal large-radius measurement (RCLRM) method. By utilizing the precise correspondence relationship between the peak point of the confocal curve and the convergence point of the multi-reflected measuring beam, we identify the position of the test lens. With a distance interferometer, we obtain the position variation of the test lens with different reflection times. Therefore, a fast and precise large-radius measurement is achieved with a shorter measuring system. Additionally, the RCLRM significantly enhances the measurement accuracy by using conic fitting. The theoretical analyses and experiments indicate that the relative expanded uncertainty is better than 0.008% (k = 2).

Original languageEnglish
Article number125007
JournalMeasurement Science and Technology
Volume26
Issue number12
DOIs
Publication statusPublished - 29 Oct 2015

Keywords

  • confocal
  • large-radius
  • measurement

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Zhang, X., Qiu, L., Li, Z., & Zhao, W. (2015). A laser reflection confocal large-radius measurement. Measurement Science and Technology, 26(12), Article 125007. https://doi.org/10.1088/0957-0233/26/12/125007