A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

Dingkang Wang, Connor Watkins, Medini Aradhya, Sanjeev Koppal, Huikai Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

12 Citations (Scopus)

Abstract

Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-Aperture, 2-Axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm2 and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.

Original languageEnglish
Title of host publicationOMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
Pages180-181
Number of pages2
ISBN (Electronic)9781728145013
DOIs
Publication statusPublished - Jul 2019
Externally publishedYes
Event2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 - Daejeon, Korea, Republic of
Duration: 28 Jul 20191 Aug 2019

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2019-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
Country/TerritoryKorea, Republic of
CityDaejeon
Period28/07/191/08/19

Keywords

  • LiDAR
  • MEMS micromirror
  • electrothermal actuation
  • large aperture

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