A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Haoran Wang; Zhenfang Chen; Huikai Xie

doi:10.1016/j.sna.2020.112018

A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Haoran Wang^*, Zhenfang Chen, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

MEMS speakers are attracting more and more interests due to their potential applications in portable and wearable electronics. However, insufficient sound pressure level (SPL) associated with the reduced size is a main challenge for most existing MEMS speakers. This paper presents the design, fabrication and characterization of a high-SPL piezoelectric MEMS speaker based on high-piezoelectric constant ceramic PZT. The ceramic PZT, bonded on an SOI substrate, was thinned down to only 5 μm successfully. The microfabricated piezoelectric MEMS speakers exhibited significantly enhanced SPLs. At a distance of 10 mm, a maximum SPL of 119 dB was achieved in open air by such a single MEMS speaker with a footprint of 6.7 mm × 6.7 mm under a low driving voltage of only 10 V_pp. The SPLs at frequencies as low as 400 Hz still reached over 90 dB. These SPLs are comparable to those of conventional loud speakers or micro-speaker arrays with significantly larger sizes.

Original language	English
Article number	112018
Journal	Sensors and Actuators A: Physical
Volume	309
DOIs	https://doi.org/10.1016/j.sna.2020.112018
Publication status	Published - 1 Jul 2020
Externally published	Yes

Keywords

Ceramic PZT
MEMS speaker
Micro speaker
PZT
Piezoelectric speaker

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10.1016/j.sna.2020.112018

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title = "A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT",

abstract = "MEMS speakers are attracting more and more interests due to their potential applications in portable and wearable electronics. However, insufficient sound pressure level (SPL) associated with the reduced size is a main challenge for most existing MEMS speakers. This paper presents the design, fabrication and characterization of a high-SPL piezoelectric MEMS speaker based on high-piezoelectric constant ceramic PZT. The ceramic PZT, bonded on an SOI substrate, was thinned down to only 5 μm successfully. The microfabricated piezoelectric MEMS speakers exhibited significantly enhanced SPLs. At a distance of 10 mm, a maximum SPL of 119 dB was achieved in open air by such a single MEMS speaker with a footprint of 6.7 mm × 6.7 mm under a low driving voltage of only 10 Vpp. The SPLs at frequencies as low as 400 Hz still reached over 90 dB. These SPLs are comparable to those of conventional loud speakers or micro-speaker arrays with significantly larger sizes.",

keywords = "Ceramic PZT, MEMS speaker, Micro speaker, PZT, Piezoelectric speaker",

author = "Haoran Wang and Zhenfang Chen and Huikai Xie",

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doi = "10.1016/j.sna.2020.112018",

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AU - Wang, Haoran

AU - Chen, Zhenfang

AU - Xie, Huikai

PY - 2020/7/1

Y1 - 2020/7/1

N2 - MEMS speakers are attracting more and more interests due to their potential applications in portable and wearable electronics. However, insufficient sound pressure level (SPL) associated with the reduced size is a main challenge for most existing MEMS speakers. This paper presents the design, fabrication and characterization of a high-SPL piezoelectric MEMS speaker based on high-piezoelectric constant ceramic PZT. The ceramic PZT, bonded on an SOI substrate, was thinned down to only 5 μm successfully. The microfabricated piezoelectric MEMS speakers exhibited significantly enhanced SPLs. At a distance of 10 mm, a maximum SPL of 119 dB was achieved in open air by such a single MEMS speaker with a footprint of 6.7 mm × 6.7 mm under a low driving voltage of only 10 Vpp. The SPLs at frequencies as low as 400 Hz still reached over 90 dB. These SPLs are comparable to those of conventional loud speakers or micro-speaker arrays with significantly larger sizes.

AB - MEMS speakers are attracting more and more interests due to their potential applications in portable and wearable electronics. However, insufficient sound pressure level (SPL) associated with the reduced size is a main challenge for most existing MEMS speakers. This paper presents the design, fabrication and characterization of a high-SPL piezoelectric MEMS speaker based on high-piezoelectric constant ceramic PZT. The ceramic PZT, bonded on an SOI substrate, was thinned down to only 5 μm successfully. The microfabricated piezoelectric MEMS speakers exhibited significantly enhanced SPLs. At a distance of 10 mm, a maximum SPL of 119 dB was achieved in open air by such a single MEMS speaker with a footprint of 6.7 mm × 6.7 mm under a low driving voltage of only 10 Vpp. The SPLs at frequencies as low as 400 Hz still reached over 90 dB. These SPLs are comparable to those of conventional loud speakers or micro-speaker arrays with significantly larger sizes.

KW - Ceramic PZT

KW - MEMS speaker

KW - Micro speaker

KW - PZT

KW - Piezoelectric speaker

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DO - 10.1016/j.sna.2020.112018

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JO - Sensors and Actuators A: Physical

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ER -

A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Abstract

Keywords

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