A decoupling calculation method of separating temperature component from the nano-scale metal film thickness measurement output by the eddy current sensor

Jinlong Wang, Hongkai Li*, Tong Zhang, Zihan Li

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'A decoupling calculation method of separating temperature component from the nano-scale metal film thickness measurement output by the eddy current sensor'. Together they form a unique fingerprint.

Engineering

Material Science