A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

DIngkang Wang, Conor Watkins, Sanjeev Koppal, Mengyuan Li, Yingtao DIng, Huikai Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Citations (Scopus)

Abstract

Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1526-1529
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • Electrothermal acutator
  • Laser Scanner
  • LiDAR
  • Micromirror
  • Non-resonant scanning
  • Omnidirectional

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