Abstract
In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].
Original language | English |
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Article number | 9151286 |
Pages (from-to) | 1038-1043 |
Number of pages | 6 |
Journal | Journal of Microelectromechanical Systems |
Volume | 29 |
Issue number | 5 |
DOIs | |
Publication status | Published - Oct 2020 |
Keywords
- Microelectromechanical systems
- PMUT array
- ceramic pzt
- endoscopic imaging
- photoacoustic imaging
- piezoelectric micromachined ultrasonic transducers