A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang*, Zhenfang Chen, Hao Yang, Huabei Jiang, Huikai Xie

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Abstract

In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].

Original languageEnglish
Article number9151286
Pages (from-to)1038-1043
Number of pages6
JournalJournal of Microelectromechanical Systems
Volume29
Issue number5
DOIs
Publication statusPublished - Oct 2020

Keywords

  • Microelectromechanical systems
  • PMUT array
  • ceramic pzt
  • endoscopic imaging
  • photoacoustic imaging
  • piezoelectric micromachined ultrasonic transducers

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