激光共焦球面元件姿态自动调整系统

In order to solve the problem of poor efficiency and repeatability during adjusting the attitude of spherical components in laser differential confocal components parameters measurement system, we designed a laser confocal automatic adjustment system for attitude of spherical component. Based on the laser confocal principle, we set up the relationship between the component misalignment and the adjusting value of electric four-dimensional adjustment mechanism, analyzed the attitude information of the component according to the airy spot position constantly measured by CCD detectors, and realized the attitude automatic adjustment by using the closed-loop feedback control algorithm. Finally, we built an automatic adjustment experiment device. The experimental results show that the shift adjustment resolution of the electric adjustment mechanism reaches 0.5 μm, and the tilt resolution reaches 10". The adjustment system can quickly and stably adjust the attitude misalignment of the device under test to the error range, effectively improving the repeatability and efficiency of the adjustment. It is especially important for the laser differential confocal measurement system to realize the automatic measurement of spherical component parameters.