基于部分补偿干涉的非球面顶点曲率半径加工误差测量

Precisely measuring the vertex radius of curvature (VROC) fabrication error is critical for the manufacture and alignment of optical aspheric surfaces. Conventional partial compensation interferometry (PCI) can only test the aspherical surface figure error which is defined as the irregular difference between the measured and nominal surface. A VROC fabrication error measurement method of aspheric surface in PCI is proposed. Based on specific aberration analysis of the residual wavefront changing with the position of the measured aspheric surface, VROC fabrication error can be obtained. The simulation experiments are done to verify the method, and the results show that the theoretical relative measuring accuracy is no less than 0.003%.