摘要
With the rapid development of the integrated circuit industry, wafers, as the carrier for chip manufacturing, have made their production efficiency and quality the focal point of industry attention. Therefore, timely anomaly detection on wafer maps holds significant importance. Wafer maps provide a visual representation of the test results of each die on the wafer and effectively present data along with its associated spatial information. Timely anomaly detection on these maps is crucial for enhancing product quality and production efficiency. This paper introduces an anomaly detection method for wafer maps that leverages the Vision Transformer (ViT) architecture and a contrastive learning mechanism. The ViT architecture is employed to deeply model the global information of wafer maps, followed by the use of a contrastive learning mechanism to capture key features that reflect healthy information in samples of healthy wafer maps. This method not only achieves leading performance but also demonstrates robust resilience under noisy and sample contamination conditions. This achievement provides strong support for the practical application of anomaly detection in wafer maps.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | 15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 |
| 编辑 | Huimin Wang, Steven Li |
| 出版商 | Institute of Electrical and Electronics Engineers Inc. |
| ISBN(电子版) | 9798350354010 |
| DOI | |
| 出版状态 | 已出版 - 2024 |
| 活动 | 15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 - Beijing, 中国 期限: 11 10月 2024 → 13 10月 2024 |
出版系列
| 姓名 | 15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 |
|---|
会议
| 会议 | 15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Beijing |
| 时期 | 11/10/24 → 13/10/24 |
联合国可持续发展目标
此成果有助于实现下列可持续发展目标:
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可持续发展目标 3 良好健康与福祉
指纹
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