@inproceedings{f36ce1224d7f44f28ab022aecb882a94,
title = "Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator",
abstract = "This paper presents a 2-axis scanning piezoelectric micromirror with zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel PZT with a Zr/Ti ratio of 53/47. The unimorph PZT actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 thin-film layers, which are released via undercutting the substrate silicon. Two-dimensional scans with a 4.8° scan range have been demonstrated at 2 V at 635 Hz (resonance).",
keywords = "PZT, Piezoelectric actuator, Piston motion, Scanning micromirror, Two-axis, Zero initial tilt",
author = "Wenjing Liu and Yiping Zhu and Jiping Li and Virendrapal, \{A. S.\} and Yongming Tang and Baoping Wang and Huikai Xie",
year = "2010",
doi = "10.1109/ICSENS.2010.5690601",
language = "English",
isbn = "9781424481682",
series = "Proceedings of IEEE Sensors",
pages = "2189--2192",
booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",
note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",
}