Triaxial MEMS Gyroscopes: A Review

As a fundamental component of inertial measurement, micro-electromechanical systems (MEMS) gyroscopes are extensively utilized in industrial robotics, drones, and personal navigation systems. Triaxial MEMS gyroscopes, capable of simultaneously measuring angular rates along three axes and providing 3-D orientation, have garnered significant attention in recent years. This article presents three contemporary integration methods for triaxial MEMS gyroscopes: 3-D integration of three single-axis gyroscopes, the monolithic single-structure triaxial gyroscope, and the monolithic multistructure gyroscope array. Furthermore, the methods are compared and analyzed, discussing their respective advantages and disadvantages, while the future applications and development trends of triaxial MEMS gyroscopes are explored.