TY - GEN
T1 - Tip-tilt-pistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators
AU - Liao, Wenjun
AU - Zhu, Yiping
AU - Liu, Wenjing
AU - Liu, Lin
AU - Tang, Yongming
AU - Wang, Baoping
AU - Xie, Huikai
PY - 2012
Y1 - 2012
N2 - This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.
AB - This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.
KW - Lead zirconate titanate (PZT)
KW - Micromirror
KW - Piezoelectric Actuators
KW - Tip-titl-piston
UR - https://www.scopus.com/pages/publications/84869157084
U2 - 10.1109/OMEMS.2012.6318852
DO - 10.1109/OMEMS.2012.6318852
M3 - Conference contribution
AN - SCOPUS:84869157084
SN - 9781457715112
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 160
EP - 161
BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Y2 - 6 August 2012 through 9 August 2012
ER -