Thermodynamic calculations of ZrC-SiC system for chemical vapor deposition applications from SiCl4-ZrCl4-CH4-H2

Qiaomu Liu*, Litong Zhang, Yiguang Wang, Laifei Cheng

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

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Engineering

Chemistry

Chemical Engineering

Material Science