TY - GEN
T1 - Thermodynamic calculations of ZrC-SiC system for chemical vapor deposition applications from SiCl4-ZrCl4-CH4-H2
AU - Liu, Qiaomu
AU - Zhang, Litong
AU - Wang, Yiguang
AU - Cheng, Laifei
PY - 2010
Y1 - 2010
N2 - Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC ternary system from SiCl4-ZrCl4-CH 4-H2 were calculated by Gibbs free energy minimization method. The effects of partial pressure of reactants, temperatures, total pressures, and carbon sources on the final condensed phases were demonstrated. It was found that the CH4 partial pressure is the controlling parameter of SiCl4-ZrCl4-CH4-H2 system. Reasonable reactant concentration ranges, temperatures and pressures for ZrC-SiC system were established according to these deposition phase diagrams. Compared with CH4, lower temperature is required to decompose C 3HD due to its lower chemical stability.
AB - Thermodynamic equilibrium condensed phases for chemical vapor deposition of ZrC-SiC ternary system from SiCl4-ZrCl4-CH 4-H2 were calculated by Gibbs free energy minimization method. The effects of partial pressure of reactants, temperatures, total pressures, and carbon sources on the final condensed phases were demonstrated. It was found that the CH4 partial pressure is the controlling parameter of SiCl4-ZrCl4-CH4-H2 system. Reasonable reactant concentration ranges, temperatures and pressures for ZrC-SiC system were established according to these deposition phase diagrams. Compared with CH4, lower temperature is required to decompose C 3HD due to its lower chemical stability.
UR - http://www.scopus.com/inward/record.url?scp=77955563294&partnerID=8YFLogxK
U2 - 10.1002/9780470909836.ch6
DO - 10.1002/9780470909836.ch6
M3 - Conference contribution
AN - SCOPUS:77955563294
SN - 9780470889367
T3 - Ceramic Transactions
SP - 65
EP - 75
BT - Design, Development, and Applications of Engineering Ceramics and Composites - A Collection of Papers Presented at the 8th Pacific Rim Conference on Ceramic and Glass Technology, PACRIM 8
PB - American Ceramic Society
T2 - 8th Pacific Rim Conference on Ceramic and Glass Technology, PACRIM-8
Y2 - 31 May 2009 through 5 June 2009
ER -