TY - JOUR
T1 - Theoretical and Experimental Study and Compensation for Temperature Drifts of Micro Thermal Convective Accelerometer
AU - Wang, Xiaoyi
AU - Xu, Wei
AU - Izhar,
AU - Lee, Yi Kuen
N1 - Publisher Copyright:
© 1992-2012 IEEE.
PY - 2020/6
Y1 - 2020/6
N2 - We present an ambient temperature compensation method for micro thermal convective accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) and temperature drift of bias (TDB). Based on the theoretical and experimental analysis, we revealed that the temperature drift of sensitivity (sensitivity attenuation) of the MTCA is not only attributed to the changing properties of the working fluids under varying ambient temperature but also resulting from the redistribution of the temperature field within the enclosing chamber of MTCA. Besides, the temperature drift of bias is analyzed, which is proportional to the changing ambient temperature. By means of the newly proposed one-dimensional (1D) model, the sensitivity attenuation function could be easily predicted without time-consuming experiments. Furthermore, with the characterized linear function of temperature drift of bias, and the digital signal processing (DSP) programming (Arduino Yun), the sensitivity compensation error could be controlled within 4% and the temperature drift of bias could be controlled within ±0.05V (sensitivity: 1.4V/g) based on on-site test results. Above all, it is meaningful that this newly designed MTCA is promising to be implemented to ambient temperature changing the environment for precise detection.
AB - We present an ambient temperature compensation method for micro thermal convective accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) and temperature drift of bias (TDB). Based on the theoretical and experimental analysis, we revealed that the temperature drift of sensitivity (sensitivity attenuation) of the MTCA is not only attributed to the changing properties of the working fluids under varying ambient temperature but also resulting from the redistribution of the temperature field within the enclosing chamber of MTCA. Besides, the temperature drift of bias is analyzed, which is proportional to the changing ambient temperature. By means of the newly proposed one-dimensional (1D) model, the sensitivity attenuation function could be easily predicted without time-consuming experiments. Furthermore, with the characterized linear function of temperature drift of bias, and the digital signal processing (DSP) programming (Arduino Yun), the sensitivity compensation error could be controlled within 4% and the temperature drift of bias could be controlled within ±0.05V (sensitivity: 1.4V/g) based on on-site test results. Above all, it is meaningful that this newly designed MTCA is promising to be implemented to ambient temperature changing the environment for precise detection.
KW - 1D model
KW - Ambient temperature compensation
KW - micro thermal convective accelerometer
KW - temperature drifts
UR - https://www.scopus.com/pages/publications/85081598578
U2 - 10.1109/JMEMS.2020.2977950
DO - 10.1109/JMEMS.2020.2977950
M3 - Article
AN - SCOPUS:85081598578
SN - 1057-7157
VL - 29
SP - 277
EP - 284
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 3
M1 - 9031350
ER -